Wang, Li:
Si Surface Preparation for Heteroepitaxial Growth of SiC Using In Situ Oxidation. 2015. — 205-208.

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https://katalog.bibliothek.tu-chemnitz.de/Record/ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuNDAyOC93d3cuc2NpZW50aWZpYy5uZXQvbXNmLjgyMS04MjMuMjA1
(Datum: 19.11.2019)