%0 Book %0 Thesis %A Hu, Xiao %I Universitätsverlag Chemnitz %D 2018 %C Chemnitz %D 2018 %G German %G English %@ 9783961000531 %@ 3961000530 %~ Katalog UB TU-Chemnitz %T Multiscale simulation of metallic copper and copper oxide atomic layer deposition from Cu Beta-diketonates %U http://d-nb.info/1163030686/04 %7 [1. Auflage] %Z https://katalog.bibliothek.tu-chemnitz.de/Record/0-1027733360 %U https://katalog.bibliothek.tu-chemnitz.de/Record/0-1027733360