%0 Book %0 Thesis %A Froemel, Joerg %I Universitätsverlag Chemnitz %D 2015 %C Chemnitz %D 2015 %G English %@ 9783944640570 %~ Katalog UB TU-Chemnitz %T Gallium-based solid liquid interdiffusion bonding of semiconductor substrates near room temperature %U http://d-nb.info/1075330823/04 %U http://deposit.d-nb.de/cgi-bin/dokserv?id=5348023&prov=M&dok_var=1&dok_ext=htm %Z https://katalog.bibliothek.tu-chemnitz.de/Record/0-1616027541 %U https://katalog.bibliothek.tu-chemnitz.de/Record/0-1616027541