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Demonstration of an imide coupling reaction on a Si(100)-2×1 surface by molecular layer deposition
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| Journal Title: | Applied Physics Letters |
|---|---|
| Authors and Corporations: | , |
| In: | Applied Physics Letters, 71, 1997, 5, p. 662-664 |
| Media Type: | E-Article |
| Language: | English |
| published: |
AIP Publishing
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| Subjects: |