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Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
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Zeitschriftentitel: | Review of Scientific Instruments |
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Personen und Körperschaften: | , , , , , |
In: | Review of Scientific Instruments, 86, 2015, 4 |
Medientyp: | E-Article |
Sprache: | Englisch |
veröffentlicht: |
AIP Publishing
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Schlagwörter: |
author_facet |
Li, Jianping Zhou, Xiaoqin Zhao, Hongwei Shao, Mingkun Fan, Zunqiang Liu, Hui Li, Jianping Zhou, Xiaoqin Zhao, Hongwei Shao, Mingkun Fan, Zunqiang Liu, Hui |
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author |
Li, Jianping Zhou, Xiaoqin Zhao, Hongwei Shao, Mingkun Fan, Zunqiang Liu, Hui |
spellingShingle |
Li, Jianping Zhou, Xiaoqin Zhao, Hongwei Shao, Mingkun Fan, Zunqiang Liu, Hui Review of Scientific Instruments Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion Instrumentation |
author_sort |
li, jianping |
spelling |
Li, Jianping Zhou, Xiaoqin Zhao, Hongwei Shao, Mingkun Fan, Zunqiang Liu, Hui 0034-6748 1089-7623 AIP Publishing Instrumentation http://dx.doi.org/10.1063/1.4918295 <jats:p>A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32 000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.</jats:p> Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion Review of Scientific Instruments |
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10.1063/1.4918295 |
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AIP Publishing, 2015 |
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2015 |
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AIP Publishing |
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Review of Scientific Instruments |
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49 |
title |
Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_unstemmed |
Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_full |
Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_fullStr |
Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_full_unstemmed |
Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_short |
Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_sort |
design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
topic |
Instrumentation |
url |
http://dx.doi.org/10.1063/1.4918295 |
publishDate |
2015 |
physical |
|
description |
<jats:p>A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32 000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.</jats:p> |
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author | Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Fan, Zunqiang, Liu, Hui |
author_facet | Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Fan, Zunqiang, Liu, Hui, Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Fan, Zunqiang, Liu, Hui |
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container_issue | 4 |
container_start_page | 0 |
container_title | Review of Scientific Instruments |
container_volume | 86 |
description | <jats:p>A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32 000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.</jats:p> |
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institution | DE-15, DE-105, DE-14, DE-Ch1 |
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spelling | Li, Jianping Zhou, Xiaoqin Zhao, Hongwei Shao, Mingkun Fan, Zunqiang Liu, Hui 0034-6748 1089-7623 AIP Publishing Instrumentation http://dx.doi.org/10.1063/1.4918295 <jats:p>A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32 000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.</jats:p> Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion Review of Scientific Instruments |
spellingShingle | Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Fan, Zunqiang, Liu, Hui, Review of Scientific Instruments, Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion, Instrumentation |
title | Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_full | Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_fullStr | Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_full_unstemmed | Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_short | Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_sort | design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
title_unstemmed | Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion |
topic | Instrumentation |
url | http://dx.doi.org/10.1063/1.4918295 |