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Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion

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Zeitschriftentitel: Review of Scientific Instruments
Personen und Körperschaften: Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Fan, Zunqiang, Liu, Hui
In: Review of Scientific Instruments, 86, 2015, 4
Medientyp: E-Article
Sprache: Englisch
veröffentlicht:
AIP Publishing
Schlagwörter:
author_facet Li, Jianping
Zhou, Xiaoqin
Zhao, Hongwei
Shao, Mingkun
Fan, Zunqiang
Liu, Hui
Li, Jianping
Zhou, Xiaoqin
Zhao, Hongwei
Shao, Mingkun
Fan, Zunqiang
Liu, Hui
author Li, Jianping
Zhou, Xiaoqin
Zhao, Hongwei
Shao, Mingkun
Fan, Zunqiang
Liu, Hui
spellingShingle Li, Jianping
Zhou, Xiaoqin
Zhao, Hongwei
Shao, Mingkun
Fan, Zunqiang
Liu, Hui
Review of Scientific Instruments
Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
Instrumentation
author_sort li, jianping
spelling Li, Jianping Zhou, Xiaoqin Zhao, Hongwei Shao, Mingkun Fan, Zunqiang Liu, Hui 0034-6748 1089-7623 AIP Publishing Instrumentation http://dx.doi.org/10.1063/1.4918295 <jats:p>A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32 000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.</jats:p> Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion Review of Scientific Instruments
doi_str_mv 10.1063/1.4918295
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title Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_unstemmed Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_full Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_fullStr Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_full_unstemmed Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_short Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_sort design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
topic Instrumentation
url http://dx.doi.org/10.1063/1.4918295
publishDate 2015
physical
description <jats:p>A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32 000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.</jats:p>
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author Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Fan, Zunqiang, Liu, Hui
author_facet Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Fan, Zunqiang, Liu, Hui, Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Fan, Zunqiang, Liu, Hui
author_sort li, jianping
container_issue 4
container_start_page 0
container_title Review of Scientific Instruments
container_volume 86
description <jats:p>A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32 000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.</jats:p>
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id ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTA2My8xLjQ5MTgyOTU
imprint AIP Publishing, 2015
imprint_str_mv AIP Publishing, 2015
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publishDate 2015
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publisher AIP Publishing
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series Review of Scientific Instruments
source_id 49
spelling Li, Jianping Zhou, Xiaoqin Zhao, Hongwei Shao, Mingkun Fan, Zunqiang Liu, Hui 0034-6748 1089-7623 AIP Publishing Instrumentation http://dx.doi.org/10.1063/1.4918295 <jats:p>A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32 000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.</jats:p> Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion Review of Scientific Instruments
spellingShingle Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Fan, Zunqiang, Liu, Hui, Review of Scientific Instruments, Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion, Instrumentation
title Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_full Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_fullStr Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_full_unstemmed Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_short Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_sort design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
title_unstemmed Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion
topic Instrumentation
url http://dx.doi.org/10.1063/1.4918295