Further Research on the Silicon Via Filling Mechanism Using an Arbitrary Lagrange-Eulerian (ALE) Method

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Zeitschriftentitel:	Journal of The Electrochemical Society
Personen und Körperschaften:	Zhang, Yazhou, Sun, Yunna, Wang, Yan, Cheng, Ping, Wang, Hong, Ding, Guifu
In:	Journal of The Electrochemical Society, 163, 2016, 2, S. D24-D32
Medientyp:	E-Article
Sprache:	Englisch
veröffentlicht:	The Electrochemical Society
Schlagwörter:	Materials Chemistry Electrochemistry Surfaces, Coatings and Films Condensed Matter Physics Renewable Energy, Sustainability and the Environment Electronic, Optical and Magnetic Materials